300mmベタ膜ウェーハリスト
項 ベタ膜ウェーハ 構成
1 ALD AL2O3 Si/200A-300A ALD Al2O3
2 ALD AlN Si/200A-300A ALD AlN
3 ALD AlON Si/200A-300A ALD AlON
4 ALD ZrO3 Si/300A ALD ZrO3
5 ALD HfO2 Si/300A ALD Zro2
6 ALD HfSiO2 Si/300A ALD HfSiO2
7 BPSG Si/5,000A-10,000A BPSG
8 BSG Si/5,000A-10,000A BSG
9 PSG Si/5,000A-10,000A PSG
10 PVD Al2O3 Si/1,000A PVD Al2O3
11 PVD AlN Si/1,000A PVD AlN
12 TEOS #1 Si/20,000A TEOS
13 TEOS #2 Si/30,000A-40,000A TEOS
14 Particle Grade TEOS Si/10,000A TEOS
15 HARP CVD酸化膜 Si/10,000A HARP酸化膜
16 eHARP CVD酸化膜 Si/7,000A-10,000A eHARP CVD酸化膜
17 HDP CVD酸化膜 Si/8,000A HDP CVD酸化膜
18 窒化膜 Si/2,000A LP-CVD SiN
19 窒化膜 Si/1,000A酸化膜/3,000A PL-CVD SiN
20 窒化膜 Si/5,000A PE-CVD SiN
21 窒化膜 Si/1,000A酸化膜/5,000A PE-CVD SiN
22 タングステン Si/2,000A酸化膜/300A PVD TiN/7,000A CVD W
23 タングステン Si/2,000A酸化膜/150A PDV TiN/6.5kA CVD W
24 PVD Co Si/5kA SiO2/250A PVD Ti/2kA PVD Co
25 CVD Co Si/1kA SiO2/~40A PVD TaN/200A CVD Co
26 CVD Co Si/1kA SiO2/~40A PVD TaN/400A CVD Co
27 ECP Co Si/1kA SiO2/40A PVD TaN/100A CVD Co/5kS ECP Co
28 Cu Si/2,000A酸化膜/250A Ta/1,000A Cu Seed膜/2um ECD Cu
29 Cu Si/2,000A酸化膜/250A Ta/1,000A Cu Seed膜/4um ECD Cu
30 Ti Si/1,000A酸化膜/2,000A PVD Ti
31 TiN Si/1kA酸化膜/200A-400A ALD TiN
32 Ta Si/1,000A酸化膜/2,000A Ta
33 TaN Si/1,000A酸化膜/2,000A TaN
34 Black Diamond-I Si/5,000A Black Diamond-I
35 Black Diamond-IIx Si/5,000A Black Diamond-II
36 Black Diamond-III Si/5,000A Black Diamond-III
37 SiC Si/1,000A酸化膜/2,000A SiC
38 Ru #1 Si/5kA酸化膜/250A Ta/2kA PVD Ru
39 Ru #2 Si/~30A ALD Al2O3/200A ALD Ru
40 Ru #3 Si/~30A ALD Al2O3/400A ALD Ru
41 Ru #4 Si/~30A ALD Al2O3/600A ALD Ru
42 SiGe (50:50) Si/2kA PVD SiGe (50:50)
43 Ge Si/PVD 2kA Ge